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     ECE 538 Integrated Circuit Technology and Fabrication
 

Introduction to the individual process steps used to fabricate semiconductor Integrated Circuit Chips starting with the refinement of raw materials and finishing with the packaging of completed chips. The integration of these component processes into state-of-the-art CMOS and bipolar device technologies is considered. 3 credit hours

  
     

Prerequisite
  

Undergraduate courses in ECE, MSE, CBE, PHYS, CHEM, including an introductory course on semiconductor materials and devices (ECE404 at NCSU), or consent of instructor.

 
Course Objectives  
  • To provide fundamental principles of processes used in silicon based integrated circuit manufacturing
  • Applications of these processes in manufacturing of modern integrated circuits
  • To review novel materials and processes considered for future devices

 
Course Requirements  

HOMEWORK: 6 – 8 Problem sets will be assigned during the semester

EXAMINATIONS: 2 mid-term exams and a final exam

SOFTWARE REQUIREMENTS: None

PROJECTS: Students will use a professional software package to simulate key processes used in Si manufacturing including ion-implantation, oxidation and diffusion.

 
Textbook  

J.D. Plummer, M. Deal and P.B. Griffin, Silicon VLSI Technology:
Fundamentals, Practice and Modeling, Copyright 2000, Edition 1, Binding Hardcover, Publisher: Prentice Hall. Required. ISBN: 0130850373

 
Computer and Internet Requirements  

NCSU has recommended minimum specifications for computers that are generally used for courses. Those specifications can be found here: http://www.ncsu.edu/it/compspecs/

Engineering Online recommends that your computer meets or exceeds the following minimum specifications below. A computer with greater capability (processor speed, RAM, internet bandwidth, disk capacity) will be more likely to properly display the video content of Engineering Online courses.

Windows:

  • Microsoft Windows XP, Windows 2003, or Windows Vista
  • Intel-compatible 1 GHz processor
  • 512 MB RAM
  • 60 GB hard drive with 1 GB free space available
  • Video display at 1024 x 768 or greater
  • Sound output and speakers
  • Microsoft Internet Explorer 6.0 SP1 or later, Firefox 2.0 or later, or Google Chrome 1.0
  • Windows Media Player 9.0 or later
  • Real One Player Basic (required for certain courses)
  • Adobe Acrobat Reader
  • Broadband Internet connection (256 Kbps or more)

Mac OS X:

  • Mac OS X 10.4.8 or later
  • G4 processor
  • 512 MB RAM
  • 60 GB hard drive with 1 GB free space available
  • Video display at 1024 x 768 or greater
  • Sound output and speakers
  • Safari 2.0.4 (or later) or Firefox 2.0 (or later)
  • Silverlight  (viewers may be prompted to install this when first viewing a presentation)
  • Real One Player Basic (required for certain courses)
  • Adobe Acrobat Reader
  • Broadband Internet connection (256 Kbps or more)
  • NOTE:  The Flip4Mac plug-in causes problems when viewing Mediasite presentations and should be disabled.

Linux:

  • Playback of Mediasite presentations on Linux is accomplished via the Moonlight Project, an open source implementation of Microsoft Silverlight. For more installation on the installation and configuration of Moonlight, please visit http://www.go-mono.com/moonlight/. The compatible operating systems and browsers are listed on this page.
  • Microsoft Media Pack for Moonlight
  • Adobe Reader for Unix
  • Broadband Internet connection (256 Kbps or more)

 
Instructor  

Dr. Mehmet C Ozturk, Professor
Monteith Engineering Res.Ctr 322-C, Box 7920
NCSU Campus
Raleigh, NC 27695

Phone: 919-515-5245
EMail: mco@ncsu.edu