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| ECE 738 Integrated Circuit Technology & Fabrication |
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Introduction to all of the individual process steps used to fabricate semiconductor Integrated Circuit Chips starting with the refinement of raw materials up to the packaging of completed chips. The integration of these component processes into state-of-the-art CMOS and bipolar device technologies is considered. 3 hours.
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Prerequisite |
An introductory course in semiconductor device physics. A background in electrical engineering, materials science, physics, chemical engineering, or chemistry. An interest in VLSI design or fabrication. |
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Course Objectives |
After taking this course, students should be able to: • Analyze Individual Semiconductor Processing Steps• Design Oxidation, Ion Implantation, and Diffusion Processes to Meet Objectives • Analyze Dopant Distributions as a Function of Processing • Define Processing Ground Rules and Layout Simple Circuits • Analyze the Interactions Among Different Processing Steps • Design a Fabrication Process to Make CMOS, Bipolar, or BiCMOS devices • Select Materials Analysis Techniques to Monitor VLSI Processing • Establish Testing Capabilities and Criteria for Evaluation of VLSI Materials and Processing |
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Course
Requirements |
Homework: Approximately 10 assignments. |
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Computer
and Internet Requirements |
NCSU has recommended minimum specifications for computers used for classes. Depending on your computer needs, we recommend your computer meet or exceed the following minimum specifications below. PCs must have an Intel-compatible 800 MHz processor, 256 MB RAM, 8 GB hard drive with 1 GB free space available, 256 Color Display, CD-ROM drive, 800x600 (min.) video adapter, sound card, and speakers. The operating system should be Windows 2000 or XP. Real One Player Basic (available free online) and high speed Internet connection such as cable, DSL, T1 or LAN will be required for EOL courses. MAC users must have a G3 processor with firewire and USB factory built-in, 256 MB RAM, 10 GB with 1GB free space available, 256 Color Display, CD-ROM drive, 800x600 (min) video adapter, sound card, and speakers. The operating system must be MacOS 10.3 (minimum) along with the above RealOne and Internet specifications above. For more detailed information on computer specifications and recommendations, please refer to our website at: http://engineeringonline.ncsu.edu/currentstudents/computeraccess.htm |
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Textbook |
Plummer, J.D. M Deal, and P.B. Griffin. Silicon VLSI Technology: Fundamentals, Practice and Modeling, Prentice-Hall, 2000. ISBN 0-13-085037-3 |
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| Instructor |
Dr. Carlton Osburn, Professor Fax: (919) 515-5055 E-Mail: osburn@ncsu.edu |
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Registration |
All students must register through the Engineering Online registration site at http://www.ncsu.edu/project/engonline/index.php. You do not have to be admitted to a degree program to enroll in an online course. However, you must have completed a bachelor’s degree in engineering, computer science, or related area from an accredited institution. Full-time, employed individuals are limited to enrollment in two graduate courses for each semester. On-campus degree seeking students must have approval from their Director of Graduate Programs to register for an Engineering Online course. Tuition and Fees per credit hour:
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