ECE 538 Integrated Circuit Technology and Fabrication

Introduction to the individual process steps used to fabricate semiconductor Integrated Circuit Chips starting with the refinement of raw materials and finishing with the packaging of completed chips. The integration of these component processes into state-of-the-art CMOS and bipolar device technologies is considered. 3 credit hours.

  
   
   
Prerequisite
  

Undergraduate courses in ECE, MSE, CBE, PHYS, CHEM, including an introductory course on semiconductor materials and devices (ECE404 at NCSU), or consent of instructor.

Course Objectives

 

  
  • To provide fundamental principles of processes used in silicon based integrated circuit manufacturing
  • Applications of these processes in manufacturing of modern integrated circuits
  • To review novel materials and processes considered for future devices

 
Course Requirements  

HOMEWORK: 8 homework assignments

EXAMINATIONS: 2 mid-term exams and a final exam

SOFTWARE REQUIREMENTS: None

PROJECTS: TBA
Textbook  

J.D. Plummer, M. Deal and P.B. Griffin, Silicon VLSI Technology:
Fundamentals, Practice and Modeling, Copyright 2000, Edition 1, Binding Hardcover, Publisher: Prentice Hall. Required. ISBN: 0130850373

 
Computer and Internet Requirements  

NCSU has recommended minimum specifications for computers used for classes. Depending on your computer needs, we recommend your computer meet or exceed the following minimum specifications below.

PCs must have an Intel-compatible 1 GHz processor, 512 MB RAM, 60 GB hard drive with 1 GB free space available, 256 Color Display, CD-ROM drive, 1024x768 (min.) video adapter, sound card, and speakers. The operating system should be Windows XP Pro. Real One Player Basic (available free online) and high speed Internet connection such as cable, DSL, T1 or LAN will be required for EOL courses.

MAC users must have a G4 processor with firewire and USB factory built-in, 512 MB RAM, 60 GB with 1GB free space available, 256 Color Display, CD-ROM drive, 1024x768 (min) video adapter, sound card, and speakers. The operating system must be MacOS 10.4 (minimum) along with the above RealOne and Internet specifications above.

For more detailed information on computer specifications and recommendations, please refer to our website at: http://engineeringonline.ncsu.edu/currentstudents/computeraccess.htm

 

Instructor  

Dr. Mehmet C Ozturk, Professor
Monteith Engineering Res.Ctr 322-C, Box 7920
NCSU Campus
Raleigh, NC 27695

Phone: 919-515-5245
EMail: mco@ncsu.edu