CHE/ECE 568 Conventional & Emerging Nanomanufacturing Techniques
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This course will cover conventional and emerging nano-manufacturing techniques and their applications in the fabrication of various structures and devices. The course will review techniques for patterning, deposition, and etching of thin films including emerging techniques such as imprint and soft lithography and other unconventional techniques.  Patterning will be an emphasis.  The course will also cover basic electronic and mechanical properties of 0 to 3-D nanostructures and their applications in nano-electronics, MEMS/NEMS devices, sensing, energy harvesting, storage, and flexible electronics. 3 credit hours.



Dr. Michael David Dickey, Professor
Chemical and Biomolecular Engineering
Engineering Building I (Eb1) 2088G, Box 7905
NCSU Campus
Raleigh, NC 27695

Phone: 919-513-0273
Email: michael_dickey@ncsu.edu

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