MSE 760 Materials Science in Processing of Semiconductor Devices
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Control of dopant profiles for the formation of shallow junctions needed for nanoscale devices, microstructural engineering to utilize Ion implantation, defect microstructures, low-resistivity Ohmic contacts, thin oxides with desired electrical properties, and impurity precipitation and electromigration phenomena need a basic understanding of underlying materials science principles and their applications. Physical properties of materials in small dimensions are expected to be frequently quite different from the bulk properties. This course deals with microscopic properties, and correlation of microstructures in nanoscale regions with corresponding physical properties. 3 credit hours.



Dr. Jay Narayan, Professor
Materials Science and Engineering
John C. Fan Distinguished Chair Professor
Engineering Bldg I (COE I) 3030, Box 7907
NCSU Campus
Raleigh, NC 27695

Phone: 919-515-7874
Fax: 919-515-7642
Email: j_narayan@ncsu.edu
Web Site: http://www.mse.ncsu.edu/profile/narayan