MAE 536 Micro-Nano Electromechanical Systems

Fundamentals and applications of micro/nano sensors and actuators. Emphasis upon MEMS/NEMS design, microfabrication techniques, and case studies of typical MEMS devices. It also covers the recent progress in nanomaterials and NEMS devices. 3 credit hours.


• Prerequisite

Previous knowledge of MEMS and nanotechnology is not required. The course is appropriate for advanced undergrads and graduate students in engineering, materials science, physics and biomedical fields.

• Course Objectives

After completing this course, the students will be able to understand the fundamentals and applications of micro/nano systems. They will be able to explain the basic actuation and sensing principles. They will be able to design simple MEMS/NEMS devices for relevant applications and realize them using micro/nano-fabrication techniques.

• Course Requirements


EXAMINATION: One take-home mid-term exam, 25%; one in-class mid-term exam, 25%

PROJECT: One final project, 35%

SOFTWARE REQUIREMENTS: None, but ANSYS is recommended

• Textbook

Chang Liu, “Foundations of MEMS,” Prentice Hall, 2006, ISBN: 0131472860. Recommended, not required.

Stephen D. Senturia, “Microsystem Design,” Kluwer, 2001, ISBN: 0792372468 (e-book available). Reference book.

Gregory T.A. Kovacs, “Micromachined Transducers Sourcebook," McGraw Hill, 1998, ISBN: 071164626. Reference book.

Marc Madou, "Fundamental of Microfabrication," CRC Press, 2002, ISBN: 0849308267. Reference book.

• Computer and Internet Requirements

NCSU and Engineering Online have recommended minimum specifications for computers. For details, click here.

• Instructor

Dr. Yong Zhu, Professor
Mechanical and Aerospace Engineering
North Carolina State University
3238 Engineering Building III
NCSU Campus Box 7910
Raleigh, NC 27695

Phone: 919-513-7735
Instructor Website: