MSE 760 Materials Science in Processing of Semiconductor Devices

3 Credit Hours

This course has two components (1) inorganic semiconductors (1-12 Lectures by Dr. Jay Narayan); and (2) organic semiconductors (13-24 by Dr. Franky So). The first part will address control of dopant profiles for the formation of shallow junctions needed for nanoscale devices, microstructural engineering to utilize Ion implantation, defect microstructures, low-resistivity Ohmic contacts, thin oxides with desired electrical properties, and impurity precipitation and electromigration phenomena need a basic understanding of underlying materials science principles and their applications. Physical properties of materials in small dimensions are expected to be frequently quite different from the bulk properties. This course deals with microscopic properties, and correlation of microstructures in nanoscale regions with corresponding physical properties.

The second part will cover the fundamentals of organic semiconductors including the energy band structure, the optical and electronic properties, the charge transport properties and characterization, excitonic processes, optical absorption and emission, organic-organic semiconductor contacts, organic-inorganic semiconductor contacts, metal-organic semiconductor contacts, ohmic contacts. Optoelectronic devices such as organic light emitting diodes, photodetectors and solar cells, fabrication by thermal evaporation and solution processing such as roll-to-roll coating will be covered. Also included in the course are the physics and chemistry of nanocrystals of semiconductors and their related devices.

Prerequisite

Basic background in materials science or consent of instructor.

Course Objectives

This course deals with the materials science aspects of semiconductor device processing. The goal of this course is to fill in the gap between physics and electrical engineering of materials and processes that are being used in nanoscale device manufacturing. As device dimensions are decreasing, the structure and properties of materials on the atomic scale play an important role in the design and fabrication of advanced nanoscale organic and inorganic semiconductor devices.

Course Topics

Part A (Lectures 1-12, 75 min each): Ion Implantation and Rapid Processing of Semiconductor Nanoscale Devices; Thin films and Epitaxy; New Materials for Ohmic Contacts and Interconnection Metallurgy; Oxidation and Nitridation; Gettering and Segregation Phenomena; Electromigration; Electronic Packaging Materials Science; Advanced Nanoscale Device Concepts

Part B (13-24): Introduction to Organic Semiconductors; Optical and Electronic Properties of Organic Semiconductors; Doping in Organic Semiconductors, Space Charge Limited Transport; Carrier Transport Measurements; Metal-Organic Semiconductor contacts; Ohmic Contacts in Organic Semiconductors; Device Fabrication Techniques; Organic Light Emitting Diodes; Fabrication of OLED displays and Thin Film Transistors.

Course Requirements

Part A: Three HW Assignments (20%); One Quiz and One Examination (50%)

Part B: One Term Paper with Oral Presentations (30%)

SOFTWARE REQUIREMENTS: Basic, C

Textbook

Part A:
The Materials Science of Thin Films, Ohrin, Academic Press, 1992; ISBN 0-125249-90-X.

Electronic Materials Science for Integrated Circuits in SI & GaAs, Mayer and Lau, MacMillan, 1990; ISBN 0-023781-40-8.

Part B:
Electronic Processes in Organic Semiconductors: An Introduction, Köhler and Bässler, 2015; ISBN-10: 3527332928