MAE 536 Micro/Nano Electromechanical Systems
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Fundamentals and applications of micro/nano sensors and actuators. Emphasis upon MEMS/NEMS design, microfabrication techniques, and case studies of typical MEMS devices. It also covers the recent progress in nanomaterials and NEMS devices. Students will have opportunity to learn commercial software packages on design and simulation of MEMS devices and to hear from experts from leading MEMS companies through guest lectures.3 credit hours.



Dr. Yong Zhu, Associate Professor
Mechanical and Aerospace Engineering
North Carolina State University
3238 Engineering Building III
NCSU Campus Box 7910
Raleigh, NC 27695

Phone: 919-513-7735
Email: yong_zhu@ncsu.edu
Instructor Website: http://www.mae.ncsu.edu/zhu

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