CHE 568 Conventional and Emerging Nanomanufacturing Techniques and Their Applications in Nanosystems

3 Credit Hours

(also offered as ECE 568)

The goal of this course is to introduce students to nanofabrication techniques and the fundamental properties of nanoscale structures. The first part of the course will cover conventional surface patterning techniques with particular attention to photolithography (the keystone process for creating modern electronics) as well as alternative methods such as imprint and soft lithography. The second part of the course will cover the electronic and physical properties of nanostructures. The final part of the course will discuss applications including microfluidics, 3D printing, energy harvesting, and interfacing electronics with biology.

Prerequisite

Graduate standing or approval of instructor.

Course Objectives

By the end of the course, the students will be able to:

1. Describe fundamental principles of conventional and emerging nano-fabrication processes.
2. Compare / contrast different nano-fabrication processes and identify the best processes for realizing certain nano-structures and devices considering such factors as electrical/mechanical properties, temperature, uniformity and cost.
3. Articulate the impact of process conditions on the properties of the thin-films or nano-structures formed and solve problems on choosing the optimal process conditions to achieve such process outcomes as film thickness, uniformity etc.
4. Explain behavior and fabrication of modern devices such as light emitting diodes, liquid crystal displays and MOSFETs based on the two-terminal building blocks.
5. Describe fundamental materials and principles employed in developing flexible electronic devices and circuits.
6. Identify and explain applications of micro- and nano-structures including microfluidics, energy harvesting, MEMS, and bio-electronics.

Course Topics

1. Micro- and nanofabrication overview
2. Photolithography overview, materials, optics
3. Unconventional fabrication (e.g., imprint lithography, soft lithography, DNA patterning, microfluidics)
4. Fabrication of 0 to 2-D nanostructures
5. Electronic and mechanical properties of nanostructures
6. Principles of transistors and electronic building blocks
7. MEMS / NEMS systems
8. Applications of nanofabrication (solar cells, energy harvesting, flexible electronics)

Course Requirements

20% Homework (weekly)

20% Exams (2-3)

40% Papers / projects

20% Participation

Textbook

None assigned, but reading provided on CHE / ECE 568 Moodle webpage.