MAE 536 Micro/Nano Electromechanical Systems

3 Credit Hours

Fundamentals and applications of micro/nano sensors and actuators. Emphasis upon MEMS/NEMS design, microfabrication techniques, and case studies of typical MEMS devices. It also covers the recent progress in nanomaterials and NEMS devices.

Prerequisite

Previous knowledge of MEMS (Micro-Electro-Mechanical Systems) and nanotechnology is not required. The course is appropriate for advanced undergrads and graduate students in engineering, materials science, physics and biomedical fields.

Course Objectives

After completing this course, the students will be able to understand the fundamentals and applications of micro/nano systems. They will be able to explain the basic actuation and sensing principles. They will be able to design simple MEMS/NEMS devices for relevant applications and realize them using micro/nano-fabrication techniques.

Course Requirements

HOMEWORK: 15%

EXAMINATION: mid-term 1, 25%; mid-term 2, 25%

PROJECT: One final project, 35%

SOFTWARE REQUIREMENTS: None, but ANSYS is recommended

Textbook

Chang Liu, Foundations of MEMS, Prentice Hall, 2006, ISBN: 0131472860. Recommended, not required.

Stephen D. Senturia, Microsystem Design, Kluwer, 2001, ISBN: 0792372468 (e-book available). Reference book.

Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, McGraw Hill, 1998, ISBN: 071164626. Reference book.

Marc Madou, Fundamentals of Microfabrication, CRC Press, 2002, ISBN: 0849308267. Reference book.