ISE 718 Micro/Nano-Scale Fabrication and Manufacturing

3 Credit Hours

Introduction to physical theory, process design, analysis, and characterization of micro/nano scale fabrication and manufacturing. The main focus of the course is on the fabrication/manufacturing of important types of microstructures used in micro/nano devices and the techniques and tools used to fabricate and characterize them.

Prerequisite

Manufacturing Engineering (NC State ISE 316) or graduate standing in the college of engineering.

Course Objectives

The main objective of the course is to explore the emerging science and engineering concepts of how to fabricate very small components and devices on the micro/nano-scale. By the end of the course the students will learn techniques and tools used to fabricate and characterize micro/nano devices. The topics include lithography, additive and subtractive processes, bulk and surface micromachining techniques. LIGA, precision and tolerance issues, packaging, scaling, actuators, and sensors.

Course Requirements

Homework: Assigned

Project: There will be a few mini-projects and a final project.

Exam: There will be a Midterm exam and a final exam.

Textbook

Recommended textbook (optional): Marc Madou, Fundamentals of Microfabrication, 2nd Edition, CRC Press, 2002, ISBN: 0849308267.

Reviewed 11/10/2020